Description
DESCRIPTION
PRODUCT SPECIFICATIONS NIST traceable with features from 2mm to 1µm for magnification 10-20,000x (ideal for desktop SEM) Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, and 1µm See mount selections, types A-R Pelcotec™ CDMS Critical Dimension Magnification Standard Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration. Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques. The Pelcotec™ CDMS Calibration Standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions: Pelcotec™ CDMS-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications Representative CDMS-1T Traceable Certificate (271KB PDF) Pelcotec™ CDMS -0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications Representative CDMS-0.1T Traceable Certificate (272KB PDF) Pelcotec™ CDMS-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications Representative CDMS-1C Conformance Certificate (190KB PDF) Pelcotec™ CDMS-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications Representative CDMS-0.1C Conformance Certificate (190KB PDF) Pelcotec™ Technical Notes for CDMS – Critical Dimension Magnification Standards (149KB PDF) Comparison Table Below Pelcotec™ CDMS-1
Pelcotec™ CDMS-0.1 Substrate: Silicon
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✓ Substrate size: 2.5 x 2.5mm
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✓ Substrate thickness: 675 ±10µm
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✓ Feature size: 2mm to 1µm
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✓ Feature size: 500, 250 and 100nm
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✓ Feature material: 50nm Cr (2mm – 5µm)
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✓ Feature material: 20nm Cr/50nm Au (2µm and 1µm)
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✓ Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm)
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✓ NIST traceable
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✓ Certification available
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✓ Unmounted
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✓ Mounts A-R available
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✓ Precision better than 0.3%
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✓ Feature sizes for the Pelcotec™ CDMS-1T and -1C are: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm Feature sizes for the Pelcotec™ CDMS-0.1T & 0.1C are: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm. The Pelcotec™ CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner. The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 675µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS calibration standard has a unique identification number. They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc, for LM applications it is mounted on a 25 x 75mm glass slide. The specimen may also be prepared on a custom mount of your choice. Store the Pelcotec™ CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
